Nano Ag Ink Patterning Performance
Cross-Sectional Shape
- Laser Microscope Evaluation
- Rectangular Shaped Wiring
- Printing Result:
Line Width < 2.7μm
thickness 240nm
Surface Resistance Value
- Film Thickness: 200nm
- Minimum Sheet Resistance:
0.16 Ω/sq (Bulk silver ≒ 0.08 Ω/s)
Alignment
- Automatic Alignment ccuracy: ±1.0μm (At Alignment mark)
- Alignment with 5um Line Width