- Measure the film thickness/quality in the microscope field of view, Show the 3-D distribution
- Good thickness resolution equivalent to the spectrometry tools.
- The wavelength can be selected from 450nm to 750nm with 1nm precision.
- Parallel processing by the spectroscopic reflectometry
- ① Several hundred repeated film such as the Bandpass Interference Filters and Composite multilayer film such as the Trench structure
- ② Sub micron pattern density estimation using Effective Medium Approximation (EMA)
- ③ Local area crystallinity evaluation such as Laser annealing
- Measure the 6.6x8.8mm□ area using the 1x obj.
- Measure the 0.5um spatial resolution using the 50x obj.