Specification

Item Specification
Installation type Stand-alone
Target substarte 100 mm, 125 mm, 150 mm, 200 mm, 300 mm Wafer with film
Light source Selectable below 3 kinds
・ Deuterium Halogen lamp
・ Halogen lamp
・ White color LED
Meaurement distance Max 60 mm
Beam spot About 3 mmø (Option 1 mmø, but in case, it enables to do alignment)
Film thickness range 10 nm - 50 nm
Max film layer Max 9 layers
Repeatability ≦ 0.1 nm
Analysis Curve fitting method
FFT method
Peak detection method
Measurement time ≦1 sec/point
Data transfer USB 2.0 Cable
・ For data input
・ For Stage control
Power
Notebook PC 100-240 VAC Max 2 A
Main Body 100-240 VAC Max 2 A
Automatic stage part 100-240 VAC Max 2 A
Weight
Notebook PC about 3 kg
Main body about 4 kg
Automatic stage part about 20 kg
Measurement
Main body (L) about 150 x (W) 160 x (H) 110 mm In case of Deuterium Halogen lamp use
Stage part (L) about 500 x (W) 340 x (H) 270 mm
Automatic stage spec
Linear stage Moving area:300 mm Resolution:4μm Max speed:40 mm/sec
Rotating stage Moving area:2-400 degrees Resolution:0.005° Max speed:30°/sec
PC transmit RS-232C (USB cable)    
Monitor display Display film thickness on real time basis
Mapping measurement result on graph display
Statistic calculation result display